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Special issue on Design, Test, Integration and Packaging of MEMS and MOEMS (DTIP 2015): Montpellier, France, April 27–30, 2015
Conference proceeding   Open access   Peer reviewed

Special issue on Design, Test, Integration and Packaging of MEMS and MOEMS (DTIP 2015): Montpellier, France, April 27–30, 2015

Pascal Nouet and Bernd Michel
Microsystem Technologies, Vol.23(9)
09/2017

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https://doi.org/10.1007/s00542-017-3509-3View
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