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Self-test and self-calibration of a MEMS convective accelerometer
Acte de colloque

Self-test and self-calibration of a MEMS convective accelerometer

Ahmed Rekik, Florence Azaïs, Frédérick Mailly, Pascal Nouet et Mohamed Masmoudi
Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP), 2013 on, Barcelona, 2013, pp. 1-4.keywords: {accelerometers;calibration;integrated circuit design;integrated circuit measurement;integrated circuit testing;microsensors;MEMS convective accelerometer;electrical-only test parameter;integrate on-chip circuitry;self-calibration procedure;self-testing;Accelerometers;Bridge circuits;Calibration;Heating;Micromechanical devices;Resistance;Sensitivity;Convective Accelerometer;Design for Test;MEMS},, pp.239-242
DTIP: Design, Test, Integration & Packaging of MEMS/MOEMS (Barcelona, Spain, 16/04/2013–18/04/2013)
2013

Résumé

integrated circuit design integrated circuit measurement integrated circuit testing microsensors MEMS convective accelerometer electrical-only test parameter integrate on-chip circuitry self-calibration procedure self-testing Accelerometers Bridge circuits Calibration Heating Micromechanical devices Resistance Sensitivity Convective Accelerometer Design for Test MEMS
This paper presents an investigation of two integrated solutions that make a previously developed electrical-only test and calibration procedure, of a MEMS convective accelerometer, realizable on-chip. The idea is to integrate on-chip circuitry that performs all required measurements and evaluates an electrical test parameter on which the test and calibration procedure is based.

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