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Raman Investigation of Heavily Al Doped 4H-SiC Layers Grown by CVD
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Raman Investigation of Heavily Al Doped 4H-SiC Layers Grown by CVD

Pawel Kwasnicki, Roxana Arvinte, Herve Peyre, Marcin Zielinski, Leszek Konczewicz, Sylvie Contreras, Jean Camassel et Sandrine Juillaguet
Material Sciences Forum, Vol.806, pp.51 - 55
HETEROSIC 2013 (nice, France, 06/2013)
10/2014

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Raman Investigation of Heavily Al Doped 4H-SiC Layers Grown by CVD

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