Pyroelectric PZT sensors screen printed on glass

Benoit Charlot; Denis Coudouel; Philippe Combette; Alain Giani; IEEE

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Conference proceeding

Pyroelectric PZT sensors screen printed on glass

Benoit Charlot, Denis Coudouel, Philippe Combette, Alain Giani and IEEE

2013 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, pp.1-5

01/01/2013

Abstract

Engineering

Engineering, Electrical & Electronic

Science & Technology

Technology

We present a pyroelectric device made from PZT screen printed on glass substrate. The pyroelectric thick film element is made of a stack of 50 mu m PZT between silver electrodes. The device is placed under thermal load by a stream made of a sequence of hot and cold water flowing through a PDMS microchannel aligned of top of the device. With this, it is possible to apply fast temperature changes above of the pyroelectric device and then produced currents proportional to the temperature derivative.

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Details

Title: Pyroelectric PZT sensors screen printed on glass
Creators - without role: Benoit Charlot - Univ Montpellier 2, IES, CNRS, Montpellier, France
Denis Coudouel - Univ Montpellier 2, IES, CNRS, Montpellier, France
Philippe Combette - Univ Montpellier 2, IES, CNRS, Montpellier, France
Alain Giani - Univ Montpellier 2, IES, CNRS, Montpellier, France
IEEE
Publication Details: 2013 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, pp.1-5
Publisher: IEEE
Number of pages: 5
Identifiers: 9979323309311
Academic Unit: Institut d'Electronique et des Systèmes - IES
Language: English
Resource Type: Conference proceeding