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Post-fabrication soft trimming of resistive sensors
Acte de colloque

Post-fabrication soft trimming of resistive sensors

Ibrahim Shankhour, Jad Mohdad, Frédérick Mailly et Pascal Nouet
20th Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS
DTIP 2018 - 20th Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (Roma, Italy, 22/05/2018–25/05/2018)
2018

Résumé

A compact and efficient architecture is introduced as an alternative to laser-trimmed precision thin-film resistor. The purpose is to compensate for process-induced offset in Wheatstone bridges and to avoid the then-obtained degradation in terms of full-scale, non-linearity, power supply noise rejection... Expected advantages are a reduced cost due to the fully-electrical implementation and, depending on the programming technology, a possible re-calibration of high-end sensors.

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