Résumé
Indium Antimonide (InSb) single-crystalline micro-pillars were mechanically deformed by uniaxial compression loading-unloading cycles up to the beginning of the plastic regime. After deformation, 2D spatially resolved maps were collected via two X-Ray Diffraction (XRD) techniques: polychromatic micro-Laue and monochromatic micro-diffraction. In both techniques, the integrated diffracted intensity shows strong variations inside the pillar. Moreover, the shift and streaking of one spot in polychromatic XRD as well as the lattice strain and tilt components derived from monochromatic XRD reveal that the plastically deformed area is localized on the top of the pillar, in agreement with scanning electron microscopy images. The two XRD techniques are thus providing correlated but yet complementary information.