Abstract
The screen printing of piezoelectric materials such as Pb(Zr-x,Ti1-x)O-3 (PZT) offers a wide range of possible applications for the development of acoustic sensors and the measurement of small size deformations. Material properties characterizations of these PZT thick-films are essential for devices design and applications. To optimize the fabrication process, we measured the electrical properties for different ranges of frequencies and temperature -from 10 mu Hz up to 13MHz between 30 and 400 degrees C of these thick-films. The piezoelectric coefficients d(33) and pyroelectric coefficient are also investigated. Various thicknesses of (PZT) thick films were deposed, up to 60 mu m by screen printing process. The deposits were obtained by superposition of several layers thick of 20 microns. We implemented different screen printing processes firing and co-firing duration, controlled temperature rate to bring the better piezoelectric material as possible. We will highlight the use of these thick films to determine liquid properties.