Résumé
Picosecond and femtosecond spectroscopy allow for a detailed study of carrier dynamics in nanosctructured materials [1]. In such experiments, a laser pulse usually excites several nanostructures at once. However, spectroscopic information may also be acquired using pulses from an electron beam in a modern scanning electron microscope (SEM), exploiting cathodoluminescence (CL) where electrons are promoted from the conduction band to the valence band upon impingement of the high energy electron beam onto a semiconductor. This approach offers several advantages over the usual optical spectroscopy . The multimode imaging capabilities of the SEM enable the correlation of optical properties (via CL) with surface morphology (secondary electron mode) at the nanometer scale [2] and the large energy of the electrons allows the excitation of wide -bandgap materials. Here, we present results obtained with an original time-resolved cathodoluminescence (TRCL) setup [3]. This setup uses ultrafast UV laser pulses to create short photoelectron pulses. The light pulses from an ultrafast UV laser illuminate a metal photocathode from which the electrons are extracted and accelerated inside the high voltage column of the microscope and focused on the sample surface. The collected CL signal is dispersed in a spectrometer and analyzed with an ultrafast STREAK camera to obtain high time resolution. Our current setup reaches combined space and time resolutions of 50 nm and 10 ps, respectively. Measurements can be carried out at temperatures between 25 K and 300 K. We will describe the TRCL setup in detail and will also present results obtained on a-plane GaN and a-plane (Al,Ga)N/GaN quantum wells (QW) [4]. We first study an epitaxial lateral overgrown (ELO) a-plane GaN grown by hydride vapor phase epitaxy on r-plane sapphire that has been studied at 27 K. Large densities of basal stacking faults (BSFs) are usually observed in a-plane GaN. These extended defects can be seen as a type-II QWs and give rise to a broad and intense emission at 3.42 eV (50 meV below the emission energy of the D°X of wurtzite GaN [6]). We evidence that exciton localization and recombination processes are strongly dependent on the local BSF density. In low-BSF-density zones, we show that the diffusion of free excitons towards BSFs is donor assisted. On the other hand, zones with BSF bundles present a totally inhibited D°X emission. The change in BSF-bound exciton luminescence decay time is explained through direct relation to the local BSF density.As a next step, we proceeded to grow a (Al,Ga)N/GaN single QW by molecular beam epitaxy on the GaN sample studied above. Interest has been very high in a-plane GaN since Waltereit et al. demonstrated ten years ago the realization of polarization free (Al,Ga)N/GaN quantum wells (QWs) [5]. Built-in electric fields are indeed absent in a-plane GaN (non-polar GaN), which allows for the growth of wide QWs without decreasing the radiative recombination probability of electrons and holes. However, even when processing techniques such as epitaxial lateral overgrowth (ELO) are used, non-polar GaN grown on sapphire presents high densities of extended defects. While dislocations are considered as non-radiative recombination centers, basal plane stacking faults (BSFs) are optically active and give rise to an emission centered 50 meV below the excitonic bandgap of GaN [7]. We present a low-temperature TRCL study of exciton dynamics as a function of the local BSF density in a-plane (Al,Ga)N/GaN single QWs grown by molecular beam epitaxy on an ELO-GaN template. First, CL experiments demonstrate the existence of nearly BSF-free regions as well as the existence of regions with BSF bundles. This indicates that the BSF distribution of the underlying a-plane GaN template [8] is reproduced in the QW. We confirm the results obtained by Badcock et al., who demonstrated that the intersection of BSFs with the QW leads to the formation of quantum wires (QWR) [9]. We then study the local relaxation-recombination dynamics of excitons in both QW and QWRs. In particular, we show that the dynamics of QW excitons is dominated by their capture by the BSFs. The QW CL decay time therefore exhibits a strong spatial dependency, explaining the large range of values reported so far for exciton radiative lifetimes in non-polar (Al,Ga)N/GaN QWs [4]. We finally demonstrate that below 60 K, QWR excitons exhibit a zero-dimensional behavior, which we relate to their binding on localization centers such as QWR-width fluctuations. [1] Shah, J. Ultrafast Spectroscopy of Semiconductors and Semiconductor Nanostructures, Ch. 8 (Springer, Berlin, 1999).[2] Reimer, L. Scanning Electron Microscopy, Ch. 1 (Springer, Berlin, 1998).[3] M. Merano et al. , Nature 438, 479 (2005).[4] P. Corfdir et al., J. Appl. Phys. 107, 043524 (2010). [5] P. Waltereit et al., Nature 406, 865 (2000).[6] P. Corfdir et al., J. Appl. Phys. 105,043102(2009). [7] G. Salviati et al., Phys. Stat. Sol. (a) 171, 325 (1999). [8] P. Corfdir et al.,Appl. Phys. Lett. 94, 201115 (2009). [9] T. J. Badcock et al., Appl. Phys. Lett. 93, 101901 (2008).