Photoacoustic infrared gas sensors based on mechanical resonators for environmental to diagnosis applications

We present in this paper a review of our works on resonators-based photoacoustic spectroscopy. We have worked on quartz enhanced photoacoustic spectroscopy (QEPAS) for many years, then developed in 2018 a new technique based on silicon mechanical resonator (MEMSPAS), dedicated to photoacoustic sensing. We will present some of the applications of these techniques, especially breath analysis by biomarkers detection for medical diagnosis.