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On the Use of the Thermal Step Method as a Tool for Characterizing Thin Layers and structures for Micro and Nano-electronics
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On the Use of the Thermal Step Method as a Tool for Characterizing Thin Layers and structures for Micro and Nano-electronics

Petru Notingher, S. Agnel, O. Fruchier, A. Toureille, F. Odiot et B. Rousset
4th Intl. Workshop « Materials for Electotechnics » (Bucarest, Romania, 2004)

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