On the Use of an Oscillation-Based Test Methodology for CMOS Micro-Electro-Mechanichal Systems

Vincent Beroulle; Yves Bertrand; Laurent Latorre; Pascal Nouet

doi:10.1109/DATE.2002.998476

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On the Use of an Oscillation-Based Test Methodology for CMOS Micro-Electro-Mechanichal Systems

Vincent Beroulle, Yves Bertrand, Laurent Latorre et Pascal Nouet

Proceedings 2002 Design, Automation and Test in Europe Conference and Exhibition, pp.1120-1120

DATE: Design, Automation and Test in Europe (Paris, France, 03/2002)

2002

DOI: https://doi.org/10.1109/DATE.2002.998476

Résumé

This paper introduces the use of the oscillation test technique for MEMS testing. This well-known test technique is here adapted to MEMS. Its efficiency is evaluated based on a case study: A CMOS electromechanical magnetometer.

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Titre: On the Use of an Oscillation-Based Test Methodology for CMOS Micro-Electro-Mechanichal Systems
Créateurs - sans rôle: Vincent Beroulle - Université de Montpellier, Laboratoire d'Informatique de Robotique et de Microélectronique de Montpellier - LIRMM
Yves Bertrand - Université de Montpellier
Laurent Latorre - Université de Montpellier
Pascal Nouet - Université de Montpellier
Détails de publication: Proceedings 2002 Design, Automation and Test in Europe Conference and Exhibition, pp.1120-1120
Colloque: DATE: Design, Automation and Test in Europe (Paris, France, 03/2002)
Identifiants: 9942892509311
Unité académique: Laboratoire d'Informatique de Robotique et de Microélectronique de Montpellier - LIRMM
Langue: English
Type de ressource: Conference proceeding
Champs locaux: lirmm-00268488