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Nonlinear modeling and estimation of force in a piezoelectric cantilever
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Nonlinear modeling and estimation of force in a piezoelectric cantilever

Micky Rakotondrabe, Yassine Haddab et Philippe Lutz
IEEE/ASME International Conference on Advanced Intelligent Mechatronics, AIM'07
IEEE/ASME International Conference on Advanced Intelligent Mechatronics, AIM'07
04/09/2007

Résumé

Engineering Sciences Micro and nanotechnologies Microelectronics
This paper deals with the estimation of force in a piezoelectric cantilever. The nonlinearities, i.e. hysteresis and creep, are taken into account. A nonlinear model relating the force, the voltage and the resultant deflection is first developped. The proposed estimator has been experimented and compared with the classical linear estimator. The results confirm the interest of the proposed method in term of accuracy.

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