Abstract
PEDOT:PSS is a conductive polymer that is widely used as electrodes in organic electronic devices. This material can also be used for implementing deformable electrodes in soft substrates for MEMS applications. However, this material being sensitive to several chemicals and water it is difficult to pattern microstructures using standard techniques. Thus, we present several techniques for patterning PEDOT:PSS conductive polymer thin film layers including PDMS Casting, shadow masking and lithography.