Résumé
A detailed comparison of true epitaxial graphene monolayers grown on both faces of 6H SiC substrates (Si and C faces) is made by combining micro-Raman spectroscopy with transmission measurements. We have already shown that such combination allows to discriminate without any ambiguity between a graphene monolayer and a twisted or folded graphene bilayer (AA') grown on the C face of 6H SiC [1]. In this presentation, we will focus on the Raman spectra and the transmission measurements performed on graphene monolayers grown on the Si face of 6H SiC. The graphene growth was tuned to get a mixed surface at the early stage of graphitization with i) bare SiC, ii) buffer layer and iii) in some localized areas small monolayers flakes on top of the buffer layer. These unique samples enabled to measure properly the Raman spectrum of the buffer layer (carbon layer with a large number of sp3 bonds) and its optical extinction at 514.5 nm. The Raman spectrum of this buffer layer remains visible after the growth of one monolayer on top but the Raman intensity is strongly reduced (typically divided by a factor of 3). This cannot be attributed to the absorption coefficient of graphene which is relatively low (few percents). Finally, several Raman mapping reveal the uniformity of the graphene monolayers in terms of thickness and crystalline quality, but also that they are subjected to a non uniform compressive strain.