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MEMS hybridisation - Bridging the free-space gap
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MEMS hybridisation - Bridging the free-space gap

Paul Blair, Duncan McMillan, Jean Podlecki, Mark Begbie et Kevin Yallup
MEMS design, fabrication, characterization, and packaging; Proceedings of the Conference, Edinburgh, United Kingdom; UNITED STATES; 30 May-1 June 2001, pp.193-201
01/05/2001

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