The use of optical tweezers and spin angular momentum transfer to birefringent particles allows new nano-scale mechanical measurements in systems where torque and rotation are relevant parameters. There is a growing interest in developing simple, fast and inexpensive protocols to produce a large number of sub-micron scale cylinders of quartz, a positive uniaxial birefringent crystal, to be employed for such angular measurements in optical tweezers. Here we present a novel method based on laser interference lithography that fulfills these requirements, producing arrays of quartz cylindrical particles over several cm(2) surface with an efficient microfabrciation process. These particles were successfully used to apply and measure optical torque in an optical torque wrench.
- Laser Interference Lithography for the collective fabrication of quartz-microcylinders
- Z. Santybayeva - Centre de Biologie StructuraleC. de Marin - Centre de Biologie StructuraleF. Pedaci - Univ Montpellier, CBS, Dep Single Mol Biophys, CNRS UMR5048,INSERM U1054, Montpellier, FranceA. Meghit - Institut d'Électronique et des SystèmesR. Teissier - Institut d'Électronique et des SystèmesF. Pichot - Univ Montpellier, CTM Cent Technol Micro & Nano Elect, Montpellier, FranceB. Charlot - Univ Montpellier, IES, CNRS, UMR5214, Montpellier, FranceIEEE
- B CharlotY MitaP NouetF PressecqM RenczP SchneiderN Tas
- 2016 SYMPOSIUM ON DESIGN, TEST, INTEGRATION AND PACKAGING OF MEMS/MOEMS (DTIP)
- IEEE
- 5
- 99162643609311
- Institut d'Electronique et des Systèmes - IES
- English
- Conference proceeding