Résumé
We study the effect of different surface functionalization methods on the sensing performances of porous silicon (PSi) microcavities when used for detection of biomolecules. Previous research on porous silicon demonstrated versatility of these devices for sensor applications based on their photonic responses. The interface between biological molecules and the Si semiconductor surface is a key issue for improving biomolecular recognition in these devices. PSi microcavities were fabricated to reveal reflectivity pass-band spectra in the visible and near-infrared domain. To assure uniform infiltration of proteins the number of layers of Bragg mirrors was limited to five, the first layer being of high porosity. In one approach the devices were thermally oxidized and functionalized to assure covalent binding of molecules. Secondly, the as etched PSi surface was modified with adhesion peptides isolated via phage display technology and presenting high binding capacity for Si. Functionalization and molecular binding events were monitored via reflectometric interference spectra as shifts in the resonance peaks of the cavity structure due to changes in the refractive index when a biomolecule is attached to the large internal surface of PSi. Improved sensitivity is obtained due to the peptide interface linkers between the PSi and biological molecules compared to the silanized devices. We investigate the formation of peptide-Si interface layer via X-ray photoelectron spectroscopy, scanning tunneling microscopy and scanning electron microscopy.