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Influence of shallow versus deep etching on dark current and quantum efficiency in InAs/GaSb superlattice photodetectors and focal plane arrays for long wavelength infrared detection
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Influence of shallow versus deep etching on dark current and quantum efficiency in InAs/GaSb superlattice photodetectors and focal plane arrays for long wavelength infrared detection

L. Höglund, J.B. Rodriguez, R. Marcks von Würtemberg, S. Naureen, R. Ivanov, C. Asplund, Rodolphe Alchaar, Philippe Christol, A. Rouvié, J. Brocal, …
QSIP2018, Vol.95, pp.158-163
QSIP2018 (Stockholm, Sweden, 06/2018)
12/2018

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