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Improvement of the Specific Contact Resistance on P-Type 4H-SiC by Using a Highly P-Typed Doped 4H-SiC Layer Selectively Grown by VLS Transport
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Improvement of the Specific Contact Resistance on P-Type 4H-SiC by Using a Highly P-Typed Doped 4H-SiC Layer Selectively Grown by VLS Transport

Nicolas Thierry-Jebali, Arthur Vo-Ha, Davy Carole, Mihai Lazar, Gabriel Ferro, Herve Peyre, Sylvie Contreras et Pierre Brosselard
Materials Science Forum, Vol.806, pp.57 - 60
HeteroSiC and WASMPE 2013
HeteroSiC-WASMPE (Nice, France, 17/06/2013–19/06/2013)
06/2015

Résumé

p++ 4H-SiC Selective Epitaxial Growth Vapor-Liquid-Solid Ohmic Contact

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