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Impact of Low-K Intra-Layer Dielectrics on Integration
Acte de colloque

Impact of Low-K Intra-Layer Dielectrics on Integration

Denis Deschacht et Fabrice Huret
9th IEEE Workshop on Signal Propagation on Interconnects, pp.181-184
9th IEEE Workshop on Signal Propagation on Interconnects (Pisa, Italy)
2002

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