Résumé
In recent years, there was much interest for Anodized Aluminum Oxide studies for their utilizations applied in nanotechnology and electronic fields. In fact, Anodized Aluminum Oxide (AAO) grows under various acid or basic electrolytes. This growth is done on different substrates as aluminum foil or silicon, glass, and plastic with aluminum thin film deposit. In previous work, we have demonstrated that wet microelectronic techniques were possible on paper substrate. So here, we show that microelectronic and electrochemical techniques are used to fabricate AAO on paper-based substrate. To achieve this goal, aluminum with high-purity is deposited on paper before being anodized. To understand and control the anodic oxidation manufacturing on paper, we have studied different parameters like the applied voltage, the electrolyte nature and the solution temperature. The technological process used to obtain AAO layer will be explained, structural (SEM, AFM, X-ray, XPS) and electrical characterizations (capacitance and dielectric losses measurement) will allow discussion of the results. And then, a reliability study was conducted to demonstrate the resistance of the different processes implemented on paper-based substrate.