Résumé
We have studied by electron paramagentic resonance spectroscopy the Mn2+ EPR spectra in low doped (x=0.03) Zn1-xMnxO films of n-type conductivity prepared by metalorganic chemical vapour deposition. Contrary to higher doped films with x=0.07, the x=0.03 film shows a weak ferromagnetic Mn-Mn interaction which we attribute to the presence of moderate deep donors leading to magnetic polaron formation.