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Experimental investigation of 4H-SiC bulk crystal growth
Acte de colloque   Open Access

Experimental investigation of 4H-SiC bulk crystal growth

K. Chourou, M. Anikin, Jm Bluet, V. Lauer, G. Guillot, Jean Camassel, Sandrine Juillaguet, O. Chaix, M. Pons et R. Madar
Silicon Carbide, III-Nitrides and Related Materials, Vol.264-268, pp.17-20
Materials Science Forum
7th International Conference on Silicon Carbide, III-Nitrides and Related Materials (ICSCIII-N 97) (Stockholm, Sweden, 31/08/1997)
1998

Résumé

silicon-carbide sublimation Sublimation Growth Polytypism Micro-Raman Wide Band Gap Semiconductors
4H-SiC single crystal ingots up to 1 inch in diameter have been grown by the Modified Lely Method. A growth sequence is proposed. The polytype study by Raman spectroscopy has shown that, in our configuration, 4H ingots could be reproducibly obtained on the (<000(1)over bar>)C face of a 4H-SiC seed. The ingot contamination by transition metals (Ti, V) is discussed in the light of low temperature photoluminescence.

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