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Excitation power dependence of Al-related features in the LTPL spectra of 4H-SiC
Acte de colloque

Excitation power dependence of Al-related features in the LTPL spectra of 4H-SiC

M. Zielinski, C. Balloud, Sandrine Juillaguet, B. Boyer, V. Souliere et Jean Camassel
SILICON CARBIDE AND RELATED MATERIALS 2004, Vol.483, pp.449-452
5th European Conference on Silicon Carbide and Related Materials (Bologna (ITALY), France, 31/08/2004)
2005

Résumé

Al doping compensation PHOTOLUMINESCENCE
Recently, a systematic comparison of SIN4S measurements with LTPL (Low Temperature Photoluminescence) spectra led us to propose a straightforward empirical calibration of the LTPL intensity versus Al content in 4H-SiC samples. In the present work we analyze the effect of the LTPL excitation power on the intensity of the Al-related features. We examine the influence of the excitation conditions on the calibration curve and determine the limitations of the method.

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