Résumé
In the field of samples observations by scanning electron microscopy (SEM), imaging material samples at elevated temperatures has got an increase of interest during the last decades. Performing in-situ observations at high temperature facilitates the understanding of materials behaviour when they are used under severe environments [1]. It is for instance the case of superalloys used for turbine blade in jet engine which must withstand high mechanical loads and extremely high temperatures. Making high temperature SEM imaging possible requires specific instruments to be developed in order to overcome several constrains (thermoionic emission, detectors thermal sensitivity…). Heating samples at elevated temperature (1000℃ and more) can be achieved by the means of miniaturized furnaces directly implemented in the SEM chamber. Most of them are built with a thin electrical resistance that uses Joule effect to warm up the sample. The accurate control and monitoring of the sample temperature needs a precise understanding of the micro-furnace thermal behaviour that is conditioned by the material components properties. In order to predict the micro-furnace capabilities, thermal modelling can be done by using finite element analysis (FEA). This tool is very helpful to design and to make an efficient micro-furnace but it requires a validation by testing a real furnace prototype. It is in this aim that a new micro-furnace prototype called FurnaSEM is manufactured and tested in controlled environments by the means of a specific bench test. The comparison of experimental data and numerical solutions is used to validate the prototype operability at high temperature.