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Creation of Quantum Centers in Silicon using Spatial Selective Ion Implantation of high Lateral Resolution
Acte de colloque

Creation of Quantum Centers in Silicon using Spatial Selective Ion Implantation of high Lateral Resolution

Tobias Herzig, Paul Raecke, Nicole Raatz, Daniel Spemann, Walid Redjem, Juergen W. Gerlach, Jan Meijer, Guillaume Cassabois, Marco Abbarchi et Sebastien Pezzagna
2018 22ND INTERNATIONAL CONFERENCE ON ION IMPLANTATION TECHNOLOGY (IIT 2018), pp.136-139
01/01/2018

Résumé

Computer Science Computer Science, Hardware & Architecture Engineering Engineering, Electrical & Electronic Science & Technology Technology
We report on our latest progress in spatial selective, high-resolution ion implantation for applications in quantum computing, sensor technology and photonics. On the basis of a well-known light-emitting defect in silicon, called G-center, we explain how our setups help to fabricate and investigate such optical centers for future generation techniques.

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