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Characterization of trench gate IGBT gate oxides submitted to thermo-electric cycling by capacitance-voltage and thermal step measurements
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Characterization of trench gate IGBT gate oxides submitted to thermo-electric cycling by capacitance-voltage and thermal step measurements

S. Baudon, L. Boyer, P. Notingher, S. Agnel, V. Smet, J.-J. Huselstein et F. Forest
8th Conference on the French Society of Electrostatics SFE (Cherbourg, France, 2012)

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