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Characterization of the Transient Behavior of Gated/STI Diodes and their Associated BJT in the CDM Time Domain
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Characterization of the Transient Behavior of Gated/STI Diodes and their Associated BJT in the CDM Time Domain

Jean-Robert Manouvrier, Pascal Fonteneau, Charles-Alexandre Legrand, Pascal Nouet et Florence Azaïs
EOS/ESD'07: 29th Electrical Overstress/Electrostatic Discharge Symposium, pp.3A.2_1- 3A.2_10
EOS/ESD'07: 29th Electrical Overstress/Electrostatic Discharge Symposium (Anaheim, CA, USA, 17/09/2007–21/09/2007)
2007

Résumé

A measurement setup for the characterization of very fast transient responses in the CDM time domain is described in this paper. Experimental results are demonstrated on STI and gated diodes with and without a guard ring implemented respectively in a 65nm and 130nm CMOS technology. The superior behavior of gated diodes during triggering is highlighted.

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