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Built-In Self-Test for Manufacturing TSV Defects before bonding
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Built-In Self-Test for Manufacturing TSV Defects before bonding

Giorgio Di Natale, Marie-Lise Flottes, Bruno Rouzeyre et Hakim Zimouche
32nd VLSI Test Symposium
VTS: VLSI Test Symposium (Napa, CA, United States, 13/04/2014–17/04/2014)
04/2014

Résumé

TSV Pin-hole PVT BIST 3D Pre-Bond Testing Void
In this paper we present a BIST method for TSV pre-bond testing. A dedicated test circuitry per TSV is desi gned and simulated w.r.t a variety of defects and PVT variations. Based on discharge delay evaluation, the BIST scheme supports concurrent testing, requires small-area implementation and it is robust against PVT variations.

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