Automated on-wafer characterization in micro-machined resonators: towards an integrated test vehicle for bulk acoustic wave resonators (FBAR)

Humberto Campanella; Pascal Nouet; Pedro de Paco; Arantxa Uranga; Nuria Barniol; Jaume Esteve; IEEE

doi:10.1109/ICMTS.2007.374474

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Automated on-wafer characterization in micro-machined resonators: towards an integrated test vehicle for bulk acoustic wave resonators (FBAR)

Humberto Campanella, Pascal Nouet, Pedro de Paco, Arantxa Uranga, Nuria Barniol, Jaume Esteve et IEEE

2007 IEEE INTERNATIONAL CONFERENCE ON MICROELECTRONIC TEST STRUCTURES, PROCEEDINGS, pp.157-161

IEEE International Conference on Microelectronic Test Structures

01/01/2007

DOI: https://doi.org/10.1109/ICMTS.2007.374474

Résumé

Engineering

Engineering, Electrical & Electronic

Instruments & Instrumentation

Science & Technology

Technology

Electrical on-wafer characterization in FBAR is automated by means of a wide-band parameter extraction algorithm, in order to define a complete characterization vehicle for FBAR and MEMS resonators. A model of FBAR-substrate losses is proposed and an automation algorithm implementing a multi-step least-squares strategy is presented. Extraction of the equivalent-circuit parameters is performed from experimental s-parameter data acquired by a microwave network analyzer. The results of FBAR and substrate characterization are presented, and the basis of an integrated test vehicle is discussed.

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Détails

Titre: Automated on-wafer characterization in micro-machined resonators: towards an integrated test vehicle for bulk acoustic wave resonators (FBAR)
Créateurs - sans rôle: Humberto Campanella - CSIC, CNM, Ctr Nacl Microelect, Campus UAB, Bellaterra 08193, Spain
Pascal Nouet - LIRMM, CNRS, UMR UM2, Montpellier, France
Pedro de Paco - Univ Autonoma Barcelona, Telecommun Engn Dept, Bellaterra, Spain
Arantxa Uranga - Univ Autonoma Barcelona, Dept Elect Engn, Bellaterra, Spain
Nuria Barniol - Univ Autonoma Barcelona, Dept Elect Engn, Bellaterra, Spain
Jaume Esteve - CSIC, CNM, Ctr Nacl Microelect, Campus UAB, Bellaterra 08193, Spain
IEEE
Détails de publication: 2007 IEEE INTERNATIONAL CONFERENCE ON MICROELECTRONIC TEST STRUCTURES, PROCEEDINGS, pp.157-161
Publications en série: IEEE International Conference on Microelectronic Test Structures
Éditeur: IEEE
Nombre de pages: 3
Note de subvention: Seiko EPSON Corporation, through its European branch EPSON Europe Electronics GmbH EPSON's Barcelona Research and Development Laboratory (BRDL)
Identifiants: 99139361009311
Unité académique: Laboratoire d'Informatique de Robotique et de Microélectronique de Mtp - LIRMM
Langue: English
Type de ressource: Conference proceeding