Résumé
Today Global warming, depletion of fossil fuels and pollution pushed the development of several research field based on the renewable nonpolluting energy. Solar cells and hydrogen production/purification is the most important energy vector for the future. The need for highly conformal thin films deposition in this modern technology make from ALD a main technique due to her three dimensional deposition ability in high aspect ratio materials. In the first part of this talk we will show the optical and photovoltaic proprieties of ZnO and ZnO doped thin film deposit by ALD for solar cell application. We will discuss the relation between film thicknesses, crystallinity and optical properties for their use in photovoltaic applications. In the second part of this talk, we will show the possibility to tune the porosity of the track-etched polymeric membranes using the deposition of multilayer of aluminum oxide/zinc oxide by ALD. The application of these hybrid membranes in gas (i.e. Hydrogen) purification will be investigated. In parallel, our progress in the design of metal nitrides (TiN and AlN) membranes by Plasma enhanced ALD for hydrogen purification and other energy application will be as well highlighted.