Logo image
Se connecter
Anti-phase boundaries annihilation in the growth of GaSb on Silicon(001)
Acte de colloque

Anti-phase boundaries annihilation in the growth of GaSb on Silicon(001)

Jean-Baptiste Rodriguez, M Rio Calvo, Charles Cornet, Laurent Cerutti, M Ramonda, A Trampert, Gilles Patriarche et Eric Tournié
21st International Conference on Molecular-Beam Epitaxy (IC-MBE 2021) (online, Mexico, 06/09/2021)

Résumé

III-V/Si heteroepitaxy monolithic integration miscut antiphase domains
We present a study of the APB annihilation mechanism during the growth of GaSb on "on-axis" Si (001) substrates. We demonstrate for the first time that the APDs are buried by the main-phase domain due to the growth rate difference existing between the two domains. We experimentally quantified the growth rate difference and explored the various parameters influencing this mechanism, using an original approach based on AFM analysis of several series of samples.

Fichiers et liens (1)

url
Find in HALAfficher

Indicateurs

1 Consultations de la notice

Détails

Logo image