Résumé
CdS thin films were grown on different substrates (glass, GaAs, Si, Al2O3) by CBD. The rms roughness of the CdS layers, measured on AFM pictures, ranges from 11 to 95 nm depending on the chemical nature of the substrate Thermal annealing of the samples leads to an improvement of the CdS crystalline quality with a conversion from cubic to hexagonal phase, whatever substrate is used, as assessed by XRD. Thermal annealing also improves the optical properties. While as-grown CdS layers photoluminescence is due to defect related emission around 1.7eV, annealed samples show dominant near band edge photoluminescence emission around 2.4 e V.