Résumé
Analytical and finite-element models of a localized-mass sensor fabricated with thin-film bulk acoustic wave resonator (FBAR) are reported. A Masonpsilas model-based analytical approach to understand the non-linear behavior of the sensor is introduced. On the other hand, careful finite-element analysis (FEA) of the sensor is carried out for different mass-loading configurations. Based on both modeling and experimental results, the non-linear behavior of the localized-mass sensorpsilas responsivity is confirmed.