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An innovative methodology for the determination of an apparent kinetic model for the chemical vapor deposition of multifunctional SiOxNy films
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An innovative methodology for the determination of an apparent kinetic model for the chemical vapor deposition of multifunctional SiOxNy films

Konstantina Christina Topka, Laura Decosterd, Marie-Joëlle Menu, Hugues Vergnes, Constantin Vahlas et Brigitte Caussat
CHISA (Prague (Czech Republic), Czech Republic, 03/2021–03/2021)

Résumé

CVD Chemical Vapor Deposition CFD Computational Fluid Dynamics Kinetics Silicon oxinitrides Thin films Gas phase analysis

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