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Advances in Liquid Phase Conversion of (100) and (111) Oriented Si Wafers into Self-standing 3C-SiC
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Advances in Liquid Phase Conversion of (100) and (111) Oriented Si Wafers into Self-standing 3C-SiC

M. Zielinski, M. Portail, T. Chassagne, Sandrine Juillaguet, Herve Peyre, A. Leycuras et Jean Camassel
SILICON CARBIDE AND RELATED MATERIALS 2008, Vol.615-617, pp.49-52
7th European Conference on Silicon Carbide and Related Materials (Barcelona (SPAIN), Spain, 07/09/2008–11/09/2008)
2009

Résumé

3C-SiC Liquid Phase Epitaxy bulk Si wafer conversion EPITAXIAL-GROWTH FILMS

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