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ALD of transparent conductive oxide and study of their physical properties
Acte de colloque

ALD of transparent conductive oxide and study of their physical properties

Mikhael Bechelany, W. Lebonniec, R. Koodakal, S. Sebastian, Ivo Utke et Michler Johann
Baltic ALD 2010 & GerALD 2 (Hambourg, Germany, 16/09/2010)

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