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A microstructural characterization of Ta-based thin films
Acte de colloque

A microstructural characterization of Ta-based thin films

J. Nazon, M.H. Berger, T. Sauvage, Jean-Claude Tedenac et Nicole Fréty
TMS 2009 (The Minerals, Metals & Materials Society), 138th Annual Meeting (United States, 02/2009)

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