Résumé
The last decade was characterized by an important increase in the request concerning miniature products. Nowadays, the miniaturization of the products represents major strategic and economic stakes. Economic surveys expect an important increase in the needs for MEMS (Micro Electro Mechanical Systems) and MOEMS (Micro Opto Electro Mechanical Systems) in various fields. Components used in MEMS are different from those used in microelectronics technology. Micromanipulation of flat SMD (Surface Mounted Devices) electronic components has been successfully done using vacuum handling systems. However, components used in MEMS have electrical, mechanical, optical or fluidic functions. These components have complex 3D shapes. This is why new micromanipulation technologies must be developed taking into account the specificities of these new components. One of the most important functions is the gripping of microcomponents. In order to fulfil the demands concerning microhandling, various laboratories have developed prototypes of microgrippers. Most of them are able to handle micro-objects in a narrow range of sizes. Moreover, these grippers are rarely equipped with precise sensors for force measurement. However, measuring the force applied by the gripper on the manipulated object is very important in order to avoid damaging or destroying the object. In this paper we present the design and the control of a microgripper dedicated to very high precision tasks. This microgripper is able to handle small components in a wide range of sizes (from 100 µm to several mm). The object handled can be moved laterally on several cm with force control.