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A Novel SCR-Based Protection Structure Against ESD with Efficient Multi-Finger Triggering
Acte de colloque   Open Access

A Novel SCR-Based Protection Structure Against ESD with Efficient Multi-Finger Triggering

Florence Azaïs, Benjamin Caillard, Stéphanie Dournelle, Pascal Nouet et Pascal Salomé
ESSDERC 2003 - 33rd European Solid-State Device Research Conference, pp.207-210
ESSDERC 2003 - 33rd European Solid-State Device Research Conference (Estoril, Portugal, 16/09/2003–18/09/2003)
2003

Résumé

Protection Electrostatic discharge Thyristors Fingers CMOS technology Voltage Switches Cathodes Chromium Inverters
In this paper, a new SCR-based protection structure is presented relying on the bimodal operation of an LSCR. STMSCR (smart triggered multi-finger SCR) is multi-finger compliant, thus allowing area-efficient design of pad-located ESD protection. Without any process customisation, an HBM failure threshold over 115 V//spl mu/m is reached for the first time while always ensuring current uniformity in multi-finger structures.

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