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A Novel Integrated Solution for the Control and Diagnosis of Electrostatic MEMS Switches
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A Novel Integrated Solution for the Control and Diagnosis of Electrostatic MEMS Switches

Carlo Trigona, Norbert Dumas, Laurent Latorre et Pascal Nouet
DTIP'11: Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, pp.315-319
DTIP'11: Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (Aix-en-Provence, France)
11/05/2011

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