- Titre
- 39.Smaller is Softer: Tuning hardness and adhesion of transparent conductive oxide nanolaminates beyond their constituents: Low Temperature ALD of Al2O3/ZnO
- Créateurs - sans rôle
- Ivo UtkeRejin RaghavanMikhael Bechelany - Université de Montpellier, Institut Européen des Membranes - IEMDamian FreyAndré BeyerMichler Johann - Swiss Federal Laboratories for Materials Science and Technology
- Colloque
- ALD 2012 & BALD 2012 (Dresde, Germany, 17/06/2012)
- Identifiants
- 9945824109311
- Unité académique
- Institut Européen des Membranes - IEM
- Langue
- English
- Type de ressource
- Conference proceeding
- Champs locaux
- hal-01704578
Acte de colloque
39.Smaller is Softer: Tuning hardness and adhesion of transparent conductive oxide nanolaminates beyond their constituents: Low Temperature ALD of Al2O3/ZnO
ALD 2012 & BALD 2012 (Dresde, Germany, 17/06/2012)
Indicateurs
1 Consultations de la notice