Kinetic Monte Carlo simulation of GaAs growth on (001) Silicon

Milan Silvestre; Audrey Gilbert; Stefano Calcaterra; Giovanni Isella; Jean-Baptiste Rodriguez; Eric Tournié

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Kinetic Monte Carlo simulation of GaAs growth on (001) Silicon

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Kinetic Monte Carlo simulation of GaAs growth on (001) Silicon

Milan Silvestre, Audrey Gilbert, Stefano Calcaterra, Giovanni Isella, Jean-Baptiste Rodriguez and Eric Tournié

Journées Nano, Micro et Optoélectronique (JNMO 2024) (Sète, France, 01/10/2024–04/10/2024)

Abstract

In this work, we study antiphase boundaries (APB) suppression during the growth of GaAs on Si (001) substrates. The kinetics of anisotropic growth is described by Kinetic Monte-Carlo (KMC) simulations that reveal atomic details of the growth.

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Title: Kinetic Monte Carlo simulation of GaAs growth on (001) Silicon
Creators - without role: Milan Silvestre - Université de Montpellier, Institut d'Electronique et des Systèmes - IES
Audrey Gilbert - Université de Montpellier, Institut d'Electronique et des Systèmes - IES
Stefano Calcaterra - Politecn Milan, LNESS Dipartimento Fis, I-22100 Como, Italy
Giovanni Isella - Politecn Milan, LNESS Dipartimento Fis, I-22100 Como, Italy
Jean-Baptiste Rodriguez - Université de Montpellier, Institut d'Electronique et des Systèmes - IES
Eric Tournié - Université de Montpellier, Institut d'Electronique et des Systèmes - IES
Conference: Journées Nano, Micro et Optoélectronique (JNMO 2024) (Sète, France, 01/10/2024–04/10/2024)
Identifiers: 9942054409311
Academic Unit: Institut d'Electronique et des Systèmes - IES
Language: English
Resource Type: Conference poster
Local Fields: hal-04738181