- Title
- Exact wafer matching process wafer to wafer inegration
- Creators - without role
- Rodolphe Giroudeau - Methods, Algorithms for Operations REsearchGiorgio Di Natale - Conception et Test de Systèmes MICroélectroniquesMarie-Lise Flottes - Conception et Test de Systèmes MICroélectroniquesFlorent Hernandez - Methods, Algorithms for Operations REsearch
- Conference
- 3D Integration Applications (Grenoble, France, 2012)
- Identifiers
- 9947766409311
- Academic Unit
- Laboratoire d'Informatique de Robotique et de Microélectronique de Mtp - LIRMM
- Language
- English
- Resource Type
- Conference poster
- Local Fields
- lirmm-00805059
Conference poster
Exact wafer matching process wafer to wafer inegration
3D Integration Applications (Grenoble, France, 2012)
16/03/2012
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