- Title
- Design of CMOS Cantilevers for Intertial Sensing
- Creators - without role
- Aboubacar Chaehoi - Conception et Test de Systèmes MICroélectroniquesLaurent Latorre - Conception et Test de Systèmes MICroélectroniquesPascal Nouet - Conception et Test de Systèmes MICroélectroniques
- Publication Details
- EUSPEN: European Society for Precision Engineering and Nanotechnology, pp.341-344
- Conference
- EUSPEN: European Society for Precision Engineering and Nanotechnology (Montpellier, France, 08/05/2005–11/05/2005)
- Identifiers
- 9946048509311
- Academic Unit
- Laboratoire d'Informatique de Robotique et de Microélectronique de Mtp - LIRMM
- Language
- English
- Resource Type
- Conference poster
- Local Fields
- lirmm-00106001
Conference poster
Design of CMOS Cantilevers for Intertial Sensing
EUSPEN: European Society for Precision Engineering and Nanotechnology, pp.341-344
EUSPEN: European Society for Precision Engineering and Nanotechnology (Montpellier, France, 08/05/2005–11/05/2005)
2005
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