Combined experimental investigation and reactive transport modeling of ALD of alumina from TMA and water

Conference poster

Giorgos Gakis, Hugues Vergnes, Emmanuel Scheid, Andreas. G. Boudouvis, Constantin Vahlas and Brigitte Caussat

RafALD (Toulouse, France, 05/11/2019–07/11/2019)

Abstract

ALD - Atomic layer deposition

CFD Computational Fluid Dynamics

Alumina

Thin films

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Title: Combined experimental investigation and reactive transport modeling of ALD of alumina from TMA and water
Creators - without role: Giorgos Gakis - Laboratoire de Génie Chimique
Hugues Vergnes - Laboratoire de Génie Chimique
Emmanuel Scheid - Équipe Matériaux et Procédés pour la Nanoélectronique
Andreas. G. Boudouvis - National Technical University of Athens
Constantin Vahlas - Centre Interuniversitaire de Recherche et d’Ingénierie des Matériaux
Brigitte Caussat - Laboratoire de Génie Chimique
Conference: RafALD (Toulouse, France, 05/11/2019–07/11/2019)
Identifiers: 9939921909311
Academic Unit: Université de Montpellier
Language: English
Resource Type: Conference poster
Local Fields: hal-04743561