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An insight into the structure–property relationships of PECVD a-SiCxNy:H membranes permselective to hydrogen
Conference poster

An insight into the structure–property relationships of PECVD a-SiCxNy:H membranes permselective to hydrogen

V. Rouessac, R. Coustel, M. Haacké, Martin Drobek, Christophe Charmette, Stephanie Roualdes and Anne Julbe
Balard Conferences 2016 (Montpellier, France, 05/04/2016–08/04/2016)
2016
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