Abstract
Performances of sensors, biosensors and membranes as well as their selectivity are dependent of the structuration, morphology and type of the used material. Atomic layer deposition (ALD) appears as a suitable synthesis technique due to its simplicity, reproducibility, the atomic scale precision of the deposited thickness and high homogeneity of the obtained films. This article deals with the use of ALD for fabricating sensors, biosensors and membranes and presents some achievements in sensing and separation. The advantages of the technique compared to common ones are highlighted using few examples taken from the literature.